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发明名称
ETCHING METHOD
摘要
申请公布号
JPH03237715(A)
申请公布日期
1991.10.23
申请号
JP19900034366
申请日期
1990.02.15
申请人
FUJITSU LTD
发明人
SHIOTANI YOSHIMI;KOBAYASHI TORU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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