SCANNING THERMAL PROFILER AND METHOD FOR INVESTIGATING SURFACE STRUCTURES

摘要

Apparatus and method are provided for investigating surface structures irrespective of the materials involved. A fine scanning tip (26) is heated to a steady state temperature at a location remote from the structure (22) to be investigated. Thereupon, the scanning tip (26) is moved to a position proximate to, but spaced from the structure (22). At the proximate position, the temperature variation from the steady state temperature is detected. The scanning tip (26) is scanned across the surface structure (22) with the aforesaid temperature variation maintained constant. The scanning tip (26) is moved both perpendicularly of, and parallel to, the surface structure (22) by means of piezo electric drivers (28, 30, 32). Feedback control (36) assures the proper transverse positioning of the scanning tip (26) and voltages thereby generated replicate the surface structure (22) to be investigated.