发明名称 A method and apparatus for measuring a carrier lifetime of IV group semiconductor.
摘要 <p>A method for measuring carrier lifetime of IV group semiconductor comprising the steps of irradiating pulse light, whose photon energy is larger than the bandgap of a IV group semiconductor and whose interval is sufficiently longer than the carrier lifetime of a IV group semiconductor, on a IV group semiconductor to be measured, exciting said IV group semiconductor by said pulse light, and generating excess carriers, obtaining a decay time of a band emission from a IV group semiconductor, and determining a carrier lifetime of said IV group semiconductor from the decay time of said band emission. &lt;IMAGE&gt;</p>
申请公布号 EP0453104(A2) 申请公布日期 1991.10.23
申请号 EP19910302597 申请日期 1991.03.26
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAHATA, AKIHIRO, C/O INTELLECTUAL PROPERTY DIV.
分类号 H01L21/66;G01N21/00;G01N21/64 主分类号 H01L21/66
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