| 摘要 |
A movable table 1 has a movable platen 6, a flange member 4 secured to the movable platen and a fixed platen 2 sandwiched between the movable platen and the flange member. Thrust bearings 11, 12 are disposed between the fixed platen and the movable platen and between the fixed platen and the flange member. Drive units 16-18 are coupled to the movable platen to move the movable platen along the thrust bearings. Instead of supporting the movable platen on the thrust bearings, it may be supported in a non-contact manner by blowing compressed air into clearances defined between the fixed platen and the movable platen and between the fixed platen and the flange member. <IMAGE>
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