| 摘要 |
PURPOSE:To obtain an Si3N4 sintered body having characteristics such as superior oxidation and wear resistances in simple stages by forming a hardly peelable surface coating layer on the surface of an Si3N4 sintered body without removing or processing the surface. CONSTITUTION:A dense, uniform and hardly peelable surface coating layer of Si3N4 SiC, TiC, TiN, ZrO2, Al2O3, BN, etc., is formed on the surface of an Si3N4 sintered body in 1-1,000mum, preferably 10-300mum thickness by chemical vapor deposition, ion plating or other method without removing or processing the surface to obtain an Si3N4 sintered body. |
