发明名称 |
Charged particle beam generating apparatus of multi-stage acceleration type |
摘要 |
A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.
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申请公布号 |
US5059859(A) |
申请公布日期 |
1991.10.22 |
申请号 |
US19900507798 |
申请日期 |
1990.04.12 |
申请人 |
HITACHI, LTD. |
发明人 |
ENDO, JUNJI;KAWASAKI, TAKESHI;TOMITA, MASAHIRO;ISAKOZAWA, SHIGETO;MIYADA, TOSHIMITU;KANEKO, YUTAKA |
分类号 |
H01J3/02;H01J37/073 |
主分类号 |
H01J3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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