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发明名称
METHOD AND APPARATUS FOR GROWTH OF SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH03235328(A)
申请公布日期
1991.10.21
申请号
JP19900031882
申请日期
1990.02.13
申请人
FUJITSU LTD
发明人
TAKENAKA CHISATO;KATO KIYOKO
分类号
H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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