SELECTIVE DOPPING METHOD OF TRENCH SIDE-WALL USING SOG FILM,申请号KR1019880014866-传众专利搜索

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发明名称	SELECTIVE DOPPING METHOD OF TRENCH SIDE-WALL USING SOG FILM
摘要
申请公布号	KR1019910008833(B1)	申请公布日期	1991.10.21
申请号	KR1019880014866	申请日期	1988.11.12
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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