FORMING METHOD FOR GRATING PATTERN,申请号JP19900029649-传众专利搜索

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发明名称	FORMING METHOD FOR GRATING PATTERN
摘要
申请公布号	JPH03235331(A)	申请公布日期	1991.10.21
申请号	JP19900029649	申请日期	1990.02.13
申请人	NEC CORP	发明人	KOJIMA YOSHIKATSU
分类号	H01L21/302;H01L21/027;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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