| 摘要 |
PURPOSE: To easily close a valve by manufacturing a miniature valve on a single silicon piece, which is a flow through valve with an inlet and an outlet on opposite sides of the silicon wafer, and providing a valve closing plate with plural flow holes. CONSTITUTION: When voltage is not applied to electrodes 8, 9, a valve is opened so that gas enters the valve through an inlet orifice 2 and flows out through an outlet hole 6 of a closing plate 4 and an outlet flow groove hole 7. When voltage is applied across the electrodes 8, 9 through contact pads 10, 11, electrostatic force proportional to square of applied voltage is produced between the electrodes so that the closing plate 4 is attracted to a valve base plate 3 to stop flow of gas passing through the valve. At this time, the closing plate 4 and the base plate 3 exactly fit to the shape of the face. The valve is manufactured by continuous vapor deposition of thin films, whereby when the surface of the silicon base plate or one of deposition films is projected or recessed, the projected or recessed part appears on the subsequent vapor deposition film as it is. |
