| 摘要 |
PURPOSE:To eliminate a generation of dust by providing a partition wall furnishing an opening, a valve main body moving along the partition wall and opening and closing the opening, a driving means, and a pressing means to squeeze the valve main body to the partition wall side and to allow to project to and retreat from the valve main body side. CONSTITUTION:When a pressured air is led in to a piping 37, a pressing rod 33 moves to the right against a spring 34 so as to occupy a position retreating from a side wall 41, and when the pressured air is led in to a piping 38, the rod 33 moves to the left to occupy a projecting position. When a wafer is processed in a precess chamber 11, a valve main body 14 is made in the closing position by a cylinder 15, and when a pressing cylinder 26 is driven to project the rod 33, the rod 33 is inserted to a recess 42 of the valve main body 14, to press and contact the valve main body 14 to the side wall 41 (partition wall), a seal member 20 seals an opening 13, and the chamber 11 and a prelimenary chamber 12 are partitioned airtight. When the opening 13 is opened, the rod 33 is moved to the retreating position by the cylinder 26, then the valve main body 14 is made in the opening position, and then, the rod 33 is projected to press the valve main body 14. |
