| 摘要 |
PURPOSE:To easily vibrate a polishing member and to realize the miniaturization and light weight, by providing the nozzle which injected the fluid compressed toward one direction, on the main body provided with a vibration generating member which is rotated by the compressed fluid in one direction and has the structure of the center of gravity being displaced from the rotation axis thereof. CONSTITUTION:A compressed air is injected toward a vibration generating member 4 from a nozzle member 5 provided on a main body, in the state of the polishing layer 13 of a polishing member 3 being brought into contact with the face to be polished. A vibration generating member 14 arranged with its center of gravity being displaced from a rotation axis l1 is rotated by this compressed air. The polishing member 3 fitted to the main body 2 is subjected to a circular motion in the arrow mark B direction within the plane orthogonal to the rotation axis l1 with this rotation. Moreover, the polishing layer 13 of the member 3 to be polished is pressed to the face to be polished with a comparatively large pressure by vibrating the whole main body 2 and this face to be polished is subjected to polishing. |
