| 摘要 |
PURPOSE:To reduce the cost of the electrode and to improve its productivity by coating the minute protrusion of a high polymer material with a conductive medium. CONSTITUTION:A mask 2 having a minute opening area is set on a substrate 1, a minute region 3 of metal or a metal oxide is formed, and then the cone or conical protrusion 3' of a high polymer material with the tip having a submicron radius of curvature is formed on the substrate 1 by laser abrasion. A wiring metal 5 is further added, and plural probes of the same shape are formed on the optional sites on the same substrate 1. Since the minute protrusion is formed by the laser abrasion technique using a carbon dioxide laser, an excimer laser 4, etc., the polymeric material such as polyimide resin and PE is preferably used for the minute protrusion. Photolithography and etching can be applied to form the minute region on the polymeric material. |
