DETECTION OF MINUTE PIT IN SILICON WAFER,申请号JP19900030050-传众专利搜索

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发明名称	DETECTION OF MINUTE PIT IN SILICON WAFER
摘要
申请公布号	JPH03233955(A)	申请公布日期	1991.10.17
申请号	JP19900030050	申请日期	1990.02.08
申请人	MITSUBISHI MATERIALS CORP;JAPAN SILICON CO LTD	发明人	MORITA ETSURO;KISHIMOTO MIKIO;TATSUTA JIRO;SHIMANUKI YASUSHI;TANAKA TOSHIRO
分类号	G01R31/26;H01L21/304;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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