发明名称 PROCESS, COMPOSITION, AND APPARATUS FOR PURIFYING INERT GASES TO REMOVE LEWIS ACID AND OXIDANT IMPURITIES THEREFROM
摘要 <p>A scavenger for purifying inert gas mixtures to remove Lewis acid and oxidant impurities therefrom, comprising (i) an inert inorganic support, and (ii) an active scavenging species on the support, formed by deposition thereon of an organometallic precursor and pyrolysis thereof at a selected elevated temperature. The organometallic precursor is an alkyl metal compound comprising a metal of Group IA, IIA, and/or IIIA, wherein the pyrolysis temperature may range from about 150 DEG C to about 250 DEG C, depending on the specific alkyl metal compound employed as the precursor. Also disclosed are: a corresponding method of making the scavenger; a process for purifying inert gases by contacting same with the scavenger; and a vessel (10) containing a bed (18) of the scavenger, useful as an apparatus for purifying inert gases.</p>
申请公布号 WO9115868(A1) 申请公布日期 1991.10.17
申请号 WO1990US01700 申请日期 1990.03.30
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 TOM, GLENN, M.;BROWN, DUNCAN, W.
分类号 B01D53/02;B01D53/28;B01J20/22;B01J20/32;C01B6/06;C01B6/34;C01B21/04;C01B23/00;C01B25/06;C01G28/00;C10B25/06 主分类号 B01D53/02
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