| 摘要 |
PURPOSE:To eliminate residual stresses and prevent deformation in cavities, and form the joining portion between the cavities as an alloy layer of a high electric conductivity and less outgas by forming the cavities separate from each other, interposing a metallic foil of a material of a melting point equal to or lower than that of the cavity material, and joining them by diffusion joining. CONSTITUTION:Cavities 1 are made separate from each other. A metallic of Ti, Sn, etc., for example of a melting point equal to or lower than that of the cavity material such as copper is interposed in the joining portion 5 between the cavities, and they are joined by diffusion joining. As a result, the area around the joining portion 5 is made into an alloy layer by the diffusion joining of solid and liquid phases, made into an integral body, and secures vacuum. The joined portion 5 is thus made free from stresses and deformation due to joining, and formed as an alloy layer of a high electric conductivity and of less outgas. |
