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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03233944(A)
申请公布日期
1991.10.17
申请号
JP19900028234
申请日期
1990.02.09
申请人
FUJITSU LTD
发明人
OOSAWA MITSUHIRO;KAMIO KYOICHI;YAMAUCHI OSAMU
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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