ETCHING PROCESS OF AL BASE METAL,申请号JP19900029260-传众专利搜索

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发明名称	ETCHING PROCESS OF AL BASE METAL
摘要
申请公布号	JPH03232230(A)	申请公布日期	1991.10.16
申请号	JP19900029260	申请日期	1990.02.07
申请人	SHARP CORP	发明人	MUKAI ATSUO
分类号	H01L21/3213;H01L21/306;H01L21/3205	主分类号	H01L21/3213
代理机构		代理人
主权项
地址

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