Method for producing multilayer optical interference coatings.

摘要

A precision multilayer optical interference coating for laser mirrors is made by plasma enhanced chemical vapor deposition of low and high index of refraction substances within a chamber. The materials for the optical quality thin films are obtained from starting reactants of the form M-R where M denotes a metal atom and R denotes an organic component. These vapor phase starting reactants are brought into a reactive atmosphere of the chamber through a plurality of orifices in one of the shaped electrodes. <IMAGE>