| 摘要 |
PURPOSE:To stably, efficiently and inexpensively regenerate used ultra-pure water without generating the leakage of bacteria by bringing the used ultra-pure water into contact, under an aerobic condition, with fixing bodies which include and fix activated sludge in and to high-polymer carriers to biologically treat this water, then irradiating the water with UV rays of a specific wavelength. CONSTITUTION:Raw water is introduced from a raw water supplying pipe 2 into an aeration tank 1. The raw water comes into contact with the activated sludge including and fixing bodies 3 packed into the aeration tank 1 and air from a diffuser 4 and is thereby subjected to the aeration treatment. The treated water is sent to a UV irradiating device 6 and is subjected to the irradiation treatment with UV rays of 185nm by a UV lamp 7 and is thereby cleaned to the level at which the water is reusable as the ultra-pure water. The used ultra pure water is extremely easily, stably, efficiently and inexpensively regenerated according to this method. |
