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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH03232964(A)
申请公布日期
1991.10.16
申请号
JP19900028765
申请日期
1990.02.07
申请人
FUJITSU LTD
发明人
TODA JUNZO;HOSONO KAZUMASA
分类号
C23C14/34;C23C14/50;H01L21/203
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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