METHOD OF PRODUCING ELECTRICAL CONNECTION MEMBERS

摘要

A method of producing electrical connection members comprises the steps of forming a carrier (505) on a first electrically conductive member (501); forming holes (142) in predetermined portions of the carrier by exposure and etching, thereby partially exposing a surface of the first electrically conductive member in the holes; etching the portions of the first electrically conductive member which are exposed in the respective holes, thereby forming recesses (502) in the first electrically conductive member so that each of the recesses has a diameter larger than the diameter of a corresponding one of the holes; filling the respective holes formed in the carrier with second electrically conductive members (150); and eliminating the first electrically conductive member from the carrier. With this method, it is possible to easily produce electrical connection members in which electrical connecting portions can be provided in a high density and in which the reliability of electrical connection can be improved, as well as from which electrically conductive members do not easily come away.