| 摘要 |
<p>A method of forming on a substrate (11) a composite film (3) comprising two or more elements, wherein matter (6,8) containing film forming elements is carried into a gaseous plasma (5), where said matter is converted into a vapour state (12) and is conveyed towards the substrate (11), to form thereon a composite film (3), having a desired combination and distribution of said elements. <IMAGE></p> |
