发明名称 A method for growing diamond crystallite structures.
摘要 <p>A method of growing high purity diamond crystallite structures at relatively high growth rates on a temperature resistant substrate, comprising (a) flowing diamond producing feed gases at low pressure through a reaction chamber containing the substrate, the feed gases being comprised of hydrocarbon devoid of methyl group gases, i.e., acetylene or ethylene, diluted by hydrogen, and (b) while concurrently raising the temperature of the substrate to the temperature range of 600-1000 DEG C, thermally activating the feed gases by use of a hot filament located within the chamber and upstream and adjacent the substrate, the filament being heated to a temperature above 1900 DEG C, that is effective to generate a substantial atomic hydrogen (H) concentration and carbon containing free radicals. A substantial additional loss in carbon balance of the gases is triggered at a lower filament temperature indicative of the formation of intermediate substances that stimulate diamond growth. The gases may be mixed prior to passing the filament and may include CO or equivalent gases to enhance diamond purity. Alternatively, the gases are delivered in a substantially nonmixed condition past said filament and are substantially mixed for the first time at the surface of the substrate. <IMAGE></p>
申请公布号 EP0452051(A1) 申请公布日期 1991.10.16
申请号 EP19910303030 申请日期 1991.04.05
申请人 FORD MOTOR COMPANY LIMITED;FORD-WERKE AKTIENGESELLSCHAFT;FORD FRANCE S. A. 发明人 WU, CHING-HSONG;TAMOR, MICHAEL ALAN;POTTER, TIMOTHY JAY
分类号 C23C16/27 主分类号 C23C16/27
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