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发明名称
MANUFACTURE OF COMPOUND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03231424(A)
申请公布日期
1991.10.15
申请号
JP19900027617
申请日期
1990.02.06
申请人
NEC CORP
发明人
OOTSUKA NAMIKI
分类号
H01L21/28;H01L21/338;H01L29/812
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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