发明名称 PRODUCTION OF METALLIC STRUCTURES ON INORGANIC NON-CONDUCTORS
摘要 The invention provides a process for the production of metallic structures on inorganic, non-conducting surfaces of substrates in which the desired structure is produced on the surface of a substrate using a covering material such as a mask or lacquer; the so treated surface of the substrates is exposed to reactive gases containing a halogen in a glow discharge zone; the covering material is removed from the surface after completion of the reaction; the substrate is metallized by conventional physical methods; to produce the desired structure and the substrate is placed in water or aqueous solutions of complexers, acids, alkalis or substances that dissolve the resulting metalhalide compound after the metallization.
申请公布号 CA1290720(C) 申请公布日期 1991.10.15
申请号 CA19860506656 申请日期 1986.04.15
申请人 SUHR, HARALD 发明人 SUHR, HARALD;FEURER, ERNST;OEHR, CHRISTIAN
分类号 C23C14/04;C04B41/51;C04B41/88;C23C14/18;C23F4/00;H05K3/02;H05K3/14;H05K3/16;H05K3/18;H05K3/24 主分类号 C23C14/04
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