发明名称 |
PRODUCTION OF METALLIC STRUCTURES ON INORGANIC NON-CONDUCTORS |
摘要 |
The invention provides a process for the production of metallic structures on inorganic, non-conducting surfaces of substrates in which the desired structure is produced on the surface of a substrate using a covering material such as a mask or lacquer; the so treated surface of the substrates is exposed to reactive gases containing a halogen in a glow discharge zone; the covering material is removed from the surface after completion of the reaction; the substrate is metallized by conventional physical methods; to produce the desired structure and the substrate is placed in water or aqueous solutions of complexers, acids, alkalis or substances that dissolve the resulting metalhalide compound after the metallization. |
申请公布号 |
CA1290720(C) |
申请公布日期 |
1991.10.15 |
申请号 |
CA19860506656 |
申请日期 |
1986.04.15 |
申请人 |
SUHR, HARALD |
发明人 |
SUHR, HARALD;FEURER, ERNST;OEHR, CHRISTIAN |
分类号 |
C23C14/04;C04B41/51;C04B41/88;C23C14/18;C23F4/00;H05K3/02;H05K3/14;H05K3/16;H05K3/18;H05K3/24 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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