| 摘要 |
<p>PURPOSE:To align adjacent arrays with high accuracy by a method wherein a reference region used to set the distance between the adjacent arrays is formed simultaneously with a light-emitting region or a photodetection region. CONSTITUTION:Light-emitting regions IP1 to IP64 of a light-emitting diode element are formed; at the same time, reference regions 41, 42 are formed and are used as positioning marks to set the distance between adjacent arrays. Also in an array A2, reference regions 43, 44 are formed as positioning marks. When arrays A1, A2 are mounted on a substrate, the image of a shape at the front of the arrays A1, A2 is picked up by using a TV camera; the image is processed, the positioning marks 41, 42 inside the array A1 are recognized; the positioning mark 43 of the adjacent array A2 is read out. Thereby, the interval between the marks 42, 43 is computed automatically so as to become a preset interval, and W=W1 is set.</p> |
