| 摘要 |
PURPOSE:To avoid changes in a rugged pattern of a substrate after a stamper is peeled by transferring a specified pattern with the stamper to the substrate comprising a continuous sheet while the sheet is carried and heated, cooling the sheet and then peeling the stamper from the substrate. CONSTITUTION:A sheet substrate 1 supplied by a sheet substrate feeder is preliminarily heated in a preheat zone and then a stamper 3 is mounted on the sheet substrate 1 in a stamper setting stage 4. The substrate 1 is pressed with the stamper 3 in a transferring stage 5 while the substrate 1 is heated so that the rugged pattern in the stamper 3 is transferred to the substrate 1. The substrate 1 is cooled as pressed with the stamper 2 in a cooling zone 6 and then the stamper 3 is peeled in a stamper peeling stage 7. In this stage, the substrate 1 is already cooled enough to prevent deformation of the rugged pattern, and thereby, the pattern on the substrate does not change. |
