| 摘要 |
PURPOSE:To perform a laser oscillation with a high efficiency and a long life by removing several kinds of fluoride compounds which are impurities in a stable condition in a cold trap. CONSTITUTION:The pressure of a gas laser medium from a laser tube 11 is reduced to 2-3 atm by a first control valve 21 and the gas laser medium enters a cold trap 6 by means of a pump. Impurity gases such as fluorides generated by a main discharge are liquefied in a reduced pressure. Gases F2 and H2 reach a compressor 25 via a valve 105 as they are gases and are stored in a storage tank 27 as high pressure refined gases. A second control valve 26 is regulated so as to be automatically opened when the set pressure of the gas laser medium in a laser oscillation is reduced. Therefore, when a pressure in a laser tube 11 is reduced below a set value, the impurity gases are removed from the storage tank 27 and the regenerated refined gas is supplied. Thus, the gas laser medium is gas-refined and a stable laser oscillation can be performed. |
