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发明名称
VACUUM TREATING DEVICE
摘要
申请公布号
JPH03229885(A)
申请公布日期
1991.10.11
申请号
JP19900024011
申请日期
1990.02.02
申请人
TOKYO ELECTRON LTD
发明人
MUKOYAMA MASABUMI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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