MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19900025578-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH03229456(A)	申请公布日期	1991.10.11
申请号	JP19900025578	申请日期	1990.02.05
申请人	ROHM CO LTD	发明人	YAMAGUCHI HITOSHI
分类号	C23C16/24;H01L21/822;H01L27/04	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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