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发明名称
SUBSTRATE INSPECTING DEVICE
摘要
申请公布号
JPH03229178(A)
申请公布日期
1991.10.11
申请号
JP19900024120
申请日期
1990.02.01
申请人
NEC CORP
发明人
UKITA AKIO
分类号
G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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