发明名称 WIRE-BONDING METHOD
摘要 PURPOSE:To contrive to improve the reliability of a substrate by reducing various stresses on the substrate through removing beforehand only the part in a wire contacting with a joining pad. CONSTITUTION:A wire 1 is irradiated with CO2 laser beforehand to expose the core wire 1b only in a part contacting with a joining pad. After such processing is conducted, the wire is aligned with the joining pad 4 and a bonding head 3 is brought into contact with the wire 1 from above the wire. A recess 3a corresponding to the shape of the wire 1 is formed at the wire side end of this bonding head 3. On the other hand, the bonding head 3 is always supplied with a constant voltage. The heated bonding head 3 is brought into contact with the wire 1 and joining pad 4 to weld a solder plating 6. The surface tension of the solder plating 6 makes a force for biasing the wire to the joining pad 4 unnecessary so that the wire 1 is joined to the joining pad 4 by a low biasing force.
申请公布号 JPH03229434(A) 申请公布日期 1991.10.11
申请号 JP19900024532 申请日期 1990.02.05
申请人 FUJITSU LTD 发明人 MATSUDA SHINJI
分类号 H01L21/60 主分类号 H01L21/60
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