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发明名称
INSPECTING METHOD FOR PATTERN
摘要
申请公布号
JPH03229110(A)
申请公布日期
1991.10.11
申请号
JP19900023672
申请日期
1990.02.02
申请人
NEC CORP
发明人
YAMAGUCHI KIYOKO
分类号
G01B15/00
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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