发明名称 |
Crystal growth method and crystalline article obtained by said method. |
摘要 |
<p>A crystal growth method for crystallizing an amorphous thin film comprises heat-treating an amorphous thin film having a region (I) with a predetermined film thickness and a region (II) with a larger film thickness than the region (I) and having a sufficiently small area so as to form only a single nucleus from which a single crystal is grown by solid phase growth at a temperature not higher than the melting point of the film.</p> |
申请公布号 |
EP0450642(A1) |
申请公布日期 |
1991.10.09 |
申请号 |
EP19910105411 |
申请日期 |
1991.04.05 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KUMOMI, HIDEYA, C/O CANON KABUSHIKI KAISHA |
分类号 |
C30B1/02;C30B25/18;H01L21/20 |
主分类号 |
C30B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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