| 摘要 |
PURPOSE:To raise a manufacturing yield and to avoid timing and economical demerits by judging whether the laminated position of an upper layer green sheet is correct or not immediately after the sheet is laminated on a laminated green sheet layer. CONSTITUTION:Whether an image of a reference via BO for confirming an upper green sheet Bg falls within an area of an allowable range mark Eo or not is judged by using an automatic focusing camera capable of automatically controlling a focus as imaging means 30a. If not, an error is displayed, the sheet Gb is peeled, and the same one is laminated, or another green sheet G is replaced, its position is regulated, and again laminated. The fact that such a laminated sheet Gb is superposed on the via Bo of a lower layer green sheet Ga in the allowable range is confirmed, and it is sequentially laminated. |
