SEMICONDUCTOR PRODUCTION DEVICE,申请号JP19900022943-传众专利搜索

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发明名称	SEMICONDUCTOR PRODUCTION DEVICE
摘要
申请公布号	JPH03228892(A)	申请公布日期	1991.10.09
申请号	JP19900022943	申请日期	1990.01.31
申请人	JAPAN SILICON CO LTD;MITSUBISHI MATERIALS CORP;MITSUBISHI ELECTRIC CORP	发明人	TOKITSU NAOTAKA;KUSAKABE KENJI
分类号	C30B15/10;H01L21/208	主分类号	C30B15/10
代理机构		代理人
主权项
地址

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