发明名称 Semiconductor device and method of manufacturing the same.
摘要 <p>A semiconductor device of the present invention comprises a silicon substrate (1), a silicon oxide layer (2) formed on the silicon substrate (1), first aluminum wires (11A and 11B) formed on the silicon oxide layer (2), a CVD SiO2 layer (4) covering at least the first aluminum wires (11A and 11B), and an inorganic oxide (3) precipitated from a liquid-phase material, the inorganic oxide (3) filling at least a gap between the first aluminum wires (11A and 11B). <IMAGE></p>
申请公布号 EP0450558(A2) 申请公布日期 1991.10.09
申请号 EP19910105165 申请日期 1991.04.02
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 WATANABE, TOHRU, C/O INTELLECTUAL PROPERTY DIV.;OKUMURA, KATSUYA, C/O INTELLECTUAL PROPERTY DIV.
分类号 H01L21/316;H01L21/768;H01L23/522;H01L23/532 主分类号 H01L21/316
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