发明名称 |
Semiconductor device and method of manufacturing the same. |
摘要 |
<p>A semiconductor device of the present invention comprises a silicon substrate (1), a silicon oxide layer (2) formed on the silicon substrate (1), first aluminum wires (11A and 11B) formed on the silicon oxide layer (2), a CVD SiO2 layer (4) covering at least the first aluminum wires (11A and 11B), and an inorganic oxide (3) precipitated from a liquid-phase material, the inorganic oxide (3) filling at least a gap between the first aluminum wires (11A and 11B). <IMAGE></p> |
申请公布号 |
EP0450558(A2) |
申请公布日期 |
1991.10.09 |
申请号 |
EP19910105165 |
申请日期 |
1991.04.02 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
WATANABE, TOHRU, C/O INTELLECTUAL PROPERTY DIV.;OKUMURA, KATSUYA, C/O INTELLECTUAL PROPERTY DIV. |
分类号 |
H01L21/316;H01L21/768;H01L23/522;H01L23/532 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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