Semiconductor waveguide and impedance-matched detector

摘要

An impedance-matched semiconductor detector formed on a portion of a waveguide. The waveguiding layer of the waveguide has one refractive index and the light absorbing layer of the detector has another refractive index. An impedance matching layer is formed between the waveguiding layer and the light absorbing layer and has a refractive index intermediate between those of the waveguiding layer and the light absorbing layer.