| 摘要 |
<p>PURPOSE:To make possible a transfer of only one wafer while the transfer time for wafers is shortened and to contrive to cover a defect of a fork for transferring simultaneously a multitude of wafers by a method wherein a fork for transferring only one wafer and a fork for transferring simultaneously a multitude of wafers are used by a combination of the operations of both of the forks. CONSTITUTION:This loading fork is provided with both of a fork 6 for transferring simultaneously 5 sheets and a fork 8 for transferring one sheet only as a fork for transfer use and is capable of performing operations in directions X, Y, Z and theta between a boat 1 and wafer cassettes 4 by a mechanism 9 for fork drive use. The fork 6 for transferring simultaneously 5 sheets is actuated to transfer five or more wafers simultaneously, extracts the wafers from a wafer cassette 4, and transfers 5 sheets en bloc in the boat 1. The fork 8 is actuated to transferred four or fewer wafers simultaneously, extracts the wafers from a wafer cassette 4, and is capable of transferring the wafers in the boat 1 sheet by sheet. Thereby, a defect of a fork for transferring simultaneously a multitude of sheets can be covered.</p> |
