| 摘要 |
PURPOSE:To remove inferior transfer, while the occurrence of fine spaces when a base plate is placed is omitted by a method in which while ultrasonic vibration is applied onto the surface of the matrix with fine shape, a stamper is coated with liquid curable resin, and on said resin, a base plate is placed, and then by pressurizing, the curable resin is made into a thin film. CONSTITUTION:A stamper 1 is placed on a rest 5, while its matrix-surface is kept upward, and ultrasonic vibrator 6 is brought in contact with the rear of the stamper 1. While ultrasonic wave is generated and vibration is applied to the stamper, the stamper 1 is coated with liquid oxidizing resin 7. A base plate 8 is placed on said resin, and pressure is applied thereto for prescribed time, whereby the curable resin 7 is extended with and is made uniform. If ultraviolet ray-curable resin is used, the ultraviolet rays are radiated from the side of the base plate 8, and if thermoplastic resin is used, it is cured at prescribed temperature. By separating said resin from the surface of the stamper 1, the layer of cured resin 7 is laminated on the base plate 8, and the laminated base plate to which the matrix-surface of the stamper 1 was exactly transferred may be obtained. |
