发明名称 |
Semiconductor integrated circuit provided with monitor-elements for checking affection of process deviation on other elements |
摘要 |
A semiconductor integrated circuit provided with a monitor arrangement for evaluating functional transistors indirectly is disclosed. The monitor arrangement includes a plurality of monitor transistors having current paths connected in parallel between a pair of terminals and a selection circuit responsive to at least one external control signal for rendering one of the monitor transistors conductive.
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申请公布号 |
US5055715(A) |
申请公布日期 |
1991.10.08 |
申请号 |
US19900503642 |
申请日期 |
1990.04.03 |
申请人 |
NEC CORPORATION |
发明人 |
INABA, HIDEO |
分类号 |
H01L21/822;G01R31/30;G01R31/316;G11C5/02;G11C5/14;H01L21/66;H01L27/04 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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