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发明名称
REDUCED PRESSURE VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH03227013(A)
申请公布日期
1991.10.08
申请号
JP19900023478
申请日期
1990.01.31
申请人
NEC CORP
发明人
WADA TAKASHI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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