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发明名称
PROCESS FOR THE EXPOSURE OF A RADIATION-SENSITIVE LAYER TO RONTGEN RAYS
摘要
申请公布号
EP0003759(B1)
申请公布日期
1982.05.05
申请号
EP19790100278
申请日期
1979.01.31
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BOHLEN, HARALD;GRESCHNER, JOHANN, DR.;KULCKE, WERNER, DR.;NEHMIZ, PETER, DR.
分类号
G03F7/095;H01L21/027;(IPC1-7):01L21/00;03F7/02
主分类号
G03F7/095
代理机构
代理人
主权项
地址
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