SEMICONDUCTOR MANUFACTURING DEVICE,申请号JP19900022924-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号	JPH03227008(A)	申请公布日期	1991.10.08
申请号	JP19900022924	申请日期	1990.01.31
申请人	MITSUBISHI ELECTRIC CORP	发明人	TANAKA AKITO
分类号	G03F7/16;H01L21/027	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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