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经营范围
发明名称
METAL VAPOR GENERATOR
摘要
申请公布号
JPH03226567(A)
申请公布日期
1991.10.07
申请号
JP19900018841
申请日期
1990.01.31
申请人
TOSHIBA CORP
发明人
NISHIZAWA KATSUSHI
分类号
B01D59/04;C23C14/30
主分类号
B01D59/04
代理机构
代理人
主权项
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