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发明名称
SPUTTERING TARGET
摘要
申请公布号
KR910007947(B1)
申请公布日期
1991.10.04
申请号
KR19880002359
申请日期
1988.03.05
申请人
TOSHIBA CORP.
发明人
FUKASAWA YOSHIHARU;KAWAI MITUO;ISHIHARA HIDEO;YAMANOBE TAKASHI
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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