发明名称 WIRE BONDING APPARATUS
摘要 PURPOSE:To prevent introduction of the air and to hold a predetermined gas atmosphere by discharging at least one type of reducing gas and inert gas from gas supply holes opened at the upper and side surfaces of a heater block, and supplying the gas to the spaces of conveying passages among the block, a feeder cover and a frame guide. CONSTITUTION:A gas supply unit for supplying at least one type of reducing gas and inert gas such as mixture gas of reducing gas containing N1 and 10% H2 and inert gas to spaces of conveying passages among a heater block 10, a feeder cover 3 and a frame guide 1 is provided, and many gas supply holes 14a, 14b opened at the upper surface of the block 10 and the side surface opposed to the guide 1 are provided through the block 10 as gas discharge holes of the unit. The gas discharged from the hole 14b opened at the side surface toward the guide 1 is operated as a role of an air curtain for shutting OFF the spaces from an outer space.
申请公布号 JPH03225931(A) 申请公布日期 1991.10.04
申请号 JP19900021517 申请日期 1990.01.31
申请人 TOSHIBA CORP 发明人 MORI IKUO;ATSUMI KOICHIRO
分类号 H01L21/60;H01L21/50 主分类号 H01L21/60
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