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发明名称
CONTACT HOLE OPENING DETECTION DEVICE
摘要
申请公布号
JPH03225843(A)
申请公布日期
1991.10.04
申请号
JP19900021325
申请日期
1990.01.30
申请人
NEC CORP
发明人
TAKAHASHI HISASHI
分类号
H01L21/66;G01N21/88;G01N21/956
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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