MAGNETIC RECORDING MEDIUM AND ITS PRODUCTION

摘要

PURPOSE:To improve durability of a diamond-like carbon film by continuously forming the diamond-like carbon film by plasma CVD method from hydrocarbon of >3 carbon number as the source material in a 80 Hz - 200 kHz frequency with over +500 V peak voltage. CONSTITUTION:On a substrate 10 having a projection layer 9, a ferromagnetic metal thin film 8 is formed, and further a plasma polymn. film 7, diamond-like carbon film 6 and lubricant layer 5 are successively formed. The back surface of the substrate is covered with a back coating layer 11. This diamond-like carbon film is continuously formed by plasma CVD method from hydrocarbon of >3 carbon number as the source material in a 80 Hz - 200 kHz frequency with over +500 V peak voltage. By this method, the diamond-like carbon film can be obtained at a massproductive deposition rate of 180 Angstrom /s to 200 Angstrom /s without causing abnormal discharge. The obtd. magnetic recording medium has a diamond-like carbon film of high durability.